The multiphysics characterisation platform is a multi-users platform open for research, education and to external academic or industrial laboratories. It is driven by the research team « MNOEMS and Instrumentation » of the Microsystems and Nanobiofluidics (MNBF) department in collaboration with PIMENT Micro/nanofabrication platform. It gathers in a 100m2 ISO7 clean room more than 15 equipments purchased, modified or developed for the characterization of processes of microfabrication and packaging, of films and of microdevices. The main available set-ups notably include:
Optical microscopy and imaging: Visible, near-inrared and DUV optical microscopes, IR microphotoelasticity in reflection mode, IR microthermography, and a system of defects inspection of bonded wafers by NIR imaging in transmision.
Optical profilometers and/or vibrometers: Several full field interferometric profilometers-vibrometers with a (sub)nanometer vertical resolution having various fields of view and wavelengths, a fibered differential laser Doppler vibrometer mounted on a microscope and a stroboscopic microscope with sub-pixel image processing for in plane nanometric displacement of vibration measurements of microstructures. Several vacuum chambers and accessories allow measurements under probes, as function of temperature or pressure, etc.
Micromechanical test benches: a Femtotools mechanical probe, Bulge test, blade test and a miniaturized 4 point bending system.
Electrical measurement systems as function of temperature: A 4 probe sheet resistance measurement set-up under vacuum and as function of temperature and gaseous environment (N2, 16O2, H2, D2, 18O2, dry air) and a cryogenic probe station for piezoresistance measurement by in-situ 4 point bending or of thermal conductivity measurements by 3 omega method.
Key Figures
20+ equipments
16 state-of-the-art equipments
100 m2 ISO7 clean-room
Platform Manager
THOMASSET Muriel (Plateforme d'Innovation en Micro et Nano Technologies)
BOSSEBOEUF Alain (Département Microsystèmes et nanobiofluidique)
