Profilometer Zoomsurf 3D

Optical profilometer vibrometer   /   FOGALE

Contacts :   THOMASSET   Muriel     /   BOSSEBOEUF   Alain   /   COSTE   Philippe

Location : E18

Optical profilometer vibrometer

  • Space
    Optical profilometer Zoomsurf

Caractéristiques

  • Resolution   :   Lateral 0.5 to 2 µm (with X5)
  • Wave length   :   white and 633 nm
  • Objective lens   :   5X, 10X, 20X, 40X
  • Field of view   :   500 µm to 3,3 mm with X5
Applications

White Light Interferometry for topography measurement

WLI is relavant for high topography analysis.

  • Space

Contacts : muriel.thomasset@c2n.upsaclay.fr

Time-averaged interferometric vibrometry

Detection limit: 3-30 nm, no phase information, no frequency limitation

  • Space

Contacts : muriel.thomasset@c2n.upsaclay.fr