Centre for Nanoscience
and Nanotechnology

  • CNRS

Multiphysics Platform

Optical profilometer M3D

Optical profilometer vibrometer   /   FOGALE

Contacts :   THOMASSET   Muriel     /   BOSSEBOEUF   Alain   /   COSTE   Philippe

Location : E18

Optical profilometer vibrometer

  • Space
    Optical profilometer M3D

Caractéristiques

  • Resolution   :   Lateral 0.3 µm to 2 µm
  • Wave length   :   532 nm, white
  • Field of view   :   200 µm to 1.5 mm
  • Objective lens   :   5X, 10X, 20X, 40X
Applications

Phase Shifting Interferometry for topography measurement

PSI is relevant for smooth topography variation with high precision (<nm rms)

  • Space

Contacts : muriel.thomasset@c2n.upsaclay.fr

Thickness measurements

White Light Interferometry applied to thickness measurement up to 700 nm

  • Space

Contacts : muriel.thomasset@c2n.upsaclay.fr

Phase Shifting Interferometry for roughness measurement

PSI is a relevant method for smooth surfaces

  • Space

Contacts : muriel.thomasset@c2n.upsaclay.fr