Bulge - Blister Testers
Characterization of membranes and pressure sensors.
Defection measured by interfrometry or laser probe. / Home made
Contacts : BOSSEBOEUF Alain
/ THOMASSET Muriel
Location : HSB
Measurement of Young modulus and tensile stress of thin films
Adhesion test of cap/dies bonding
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Caractéristiques
- Pressure : Max : 50 bars
- Pressure : sensor : 10 bars
- Resolution : 10-4 bar