In-situ resistivity measurement device
Sheet resistance measurement as function of temperature and gaseous atmosphere / Home made instrument
Contacts : THOMASSET Muriel
/ BESSOUET Clément
/ BOSSEBOEUF Alain
Location : E18
Automated system,
In line 4 WC probes (400 µm diameter)
Corrected factor integrated in software
Programmable T cycle and gaz injection
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In situ resistivity device
Caractéristiques
- Gas Line : H2, O2, N2,D2, Air
- Temperature range : 20° C to 400 °C
- Pressure : 10-7 mbar
- Mode process : R as function of time and temperature
