In-situ resistivity measurement device

Sheet resistance measurement as function of temperature and gaseous atmosphere   /   Home made instrument

Contacts :   THOMASSET   Muriel     /   BESSOUET   Clément   /   BOSSEBOEUF   Alain

Location : E18

Automated system, In line 4 WC probes (400 µm diameter) Corrected factor integrated in software Programmable T cycle and gaz injection

  • Space
    In situ resistivity device

Caractéristiques

  • Gas Line   :   H2, O2, N2,D2, Air
  • Temperature range   :   20° C to 400 °C
  • Pressure   :   10-7 mbar
  • Mode process   :   R as function of time and temperature
Applications

Sheet resistance measurement

As function of temperature

  • Space

Contacts : alain.bosseboeuf@c2n.upsaclay.fr