Optical profilometer VISIR

Topography measurement and vibrometry   /   Home made instrument

Contacts :   THOMASSET   Muriel     /   BOSSEBOEUF   Alain   /   COSTE   Philippe

Location : E18

Compatible with vacuum chamber or electrical probe

  • Space
    VIS-IR profilometer

Caractéristiques

  • Field of view   :   2.5 to 25 mm
  • Zoom Lenses   :   zoom X0.75 to 6.5
  • Stage   :   Manual
  • Resolution   :   0.5 to 30 µm
  • Focus   :   Depth : 244 µm to 6.8 mm
Expertises

Stress analysis by topography measurement

Phase shifting interferometry @532 nm used for topography measurement

  • Space

Contacts : muriel.thomasset@c2n.upsaclay.fr

3D profile with stitching

Microstructure MEMS

  • Space

Contacts : alain.bosseboeuf@c2n.upsaclay.fr